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Volume 17 Issue 5
Sep.  1995
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Yan Beiping, Peng Jun, Chai Changckun. PREPARATION,STRUCTURE AND GAS SENSING PROPERTIES OF Fe2O3 THIN FILMS[J]. Journal of Electronics & Information Technology, 1995, 17(5): 506-511.
Citation: Yan Beiping, Peng Jun, Chai Changckun. PREPARATION,STRUCTURE AND GAS SENSING PROPERTIES OF Fe2O3 THIN FILMS[J]. Journal of Electronics & Information Technology, 1995, 17(5): 506-511.

PREPARATION,STRUCTURE AND GAS SENSING PROPERTIES OF Fe2O3 THIN FILMS

  • Received Date: 1993-12-06
  • Rev Recd Date: 1994-05-24
  • Publish Date: 1995-09-19
  • A method to deposit hematite (Fe2O3) thin films by plasma-enhanced chemical vapor deposition (PECVD) is introduced. The structure and particle-size of Fe2O5 thin film are analysed by X-ray diffraction and SEM, respectively. The gas sensitive properties of thin film to LPG, coal gas, hydrogen and ethanol are studied. The results show that films prepared in this way are highly sensitive to ethanol. However, it is not so sensitive to LPG, coal gas or hydrogen. Therefore the film is proved to have high selectivity.
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  • Matsuoka M, Nakatani Y, Ochido H. Nat. Tech. Rep., 1978, 24(4): 461-464.[2]Nakatani Y, Matsuoka M. Jpn[J].J. Appl. Phys.1982, 21(12):758-760[3]Yamazaki T, Wada S, Noma T, Suzuki T. Gas Sensing Properties of Ultrathin Zinc Oxide Films. Technical Digest of the Fourth International Meeting[4]on Chemical Sensors. Tokyo, Japan: September 13-17, 1992, 672-673.[5]Matsushima S, et al. NO2 Gas Sensing Properties of Ga-Doped ZnO Thin Film. Technical Digest of the Fourth International Meeting[6]on Chemical Sensors. Tokyo, Japan: September 13-[7]1992. 704-705.[8]Maekawa T, et al. Sensors and Actuators, 1992, B9(1): 63-69.[9]Demarne V, Grisel A. Sensors and Actuators, 1990, B1(1-6): 87-91.[10]Xu J Q, Shen Y S. Gas Sensitive Character of UFP -Fe2O3 made by PCVD. Technica3 DiResi of the Fourth International Meeting[11]on Chemical Sensors. Tokyo, Japan: September 13-17,1992,766-767.
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