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Volume 21 Issue 4
Jul.  1999
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Kang Niankan, Xia Shanhong. MONTE CARLO SIMULATION OF ENERGY SPECTRUM AND SPACE CHARGE EFFECT OF MULTI-ENERGY ELECTRON BEAMS[J]. Journal of Electronics & Information Technology, 1999, 21(4): 522-528.
Citation: Kang Niankan, Xia Shanhong. MONTE CARLO SIMULATION OF ENERGY SPECTRUM AND SPACE CHARGE EFFECT OF MULTI-ENERGY ELECTRON BEAMS[J]. Journal of Electronics & Information Technology, 1999, 21(4): 522-528.

MONTE CARLO SIMULATION OF ENERGY SPECTRUM AND SPACE CHARGE EFFECT OF MULTI-ENERGY ELECTRON BEAMS

  • Received Date: 1997-11-12
  • Rev Recd Date: 1998-11-07
  • Publish Date: 1999-07-19
  • An approach to generate a multi-energy electron beam by transmitting a monoen-ergetic beam though a solid film is proposed. The energy (velocity) spectrum of the resultant beam is predicted by Monte Carlo simulation of electron scattering. The calculation accuracy is fairly good in comparison with available measurements. Space charge effect of a multi-energy electron beam in a uniform electrical field or field-free space has also been analyzed.
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  • 康念坎, 等.多能谱电子束的获得和性能.第六届全国电子束离子束学术年会论文集.宜昌:1995, 21.[2]丁泽军. Monte Carla方法在微束分析中的应用.电子显微学报, 1996, 15(6): 125-132.[3]Shimizu R, Ding Zejun. Monte-Carlo modeling of electron-solid interaction[J].Reports on Progress in Physics.1992, 55(1):487-514[4]Shimizu R, et al. J. Phys[J].D: Appl. Phys.1976, 9(1):101-108
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