Tao Xinxin, Xia Shanhong, Su Jie, Chen Shaofeng. RESEARCH ON CATHODE-ON-MEMBRANE VACUUM MICROELECTRONIC PRESSURE SENSOR[J]. Journal of Electronics & Information Technology, 2001, 23(1): 81-84.
Citation:
Tao Xinxin, Xia Shanhong, Su Jie, Chen Shaofeng. RESEARCH ON CATHODE-ON-MEMBRANE VACUUM MICROELECTRONIC PRESSURE SENSOR[J]. Journal of Electronics & Information Technology, 2001, 23(1): 81-84.
Tao Xinxin, Xia Shanhong, Su Jie, Chen Shaofeng. RESEARCH ON CATHODE-ON-MEMBRANE VACUUM MICROELECTRONIC PRESSURE SENSOR[J]. Journal of Electronics & Information Technology, 2001, 23(1): 81-84.
Citation:
Tao Xinxin, Xia Shanhong, Su Jie, Chen Shaofeng. RESEARCH ON CATHODE-ON-MEMBRANE VACUUM MICROELECTRONIC PRESSURE SENSOR[J]. Journal of Electronics & Information Technology, 2001, 23(1): 81-84.
This paper proposes a novel cathode-on-membrane vacuum microelectronic pressure sensor. The cathode-on-membrane structure has been fabricated. The properties of the silicon membrane under pressure are simulated, and the effects of the parameters of membrame structure on the sensitivity are discussed.
Jiang J C,White R C,Allen P K.Digest of technical papers of 1991 international conference on solid-state sensors and actuators: 238-240.[2]Xia S H,Liu J,Chen F C,Han J H,Cui D F.J.Vac.Sci.Technol,1997,B-15(4): 1573-1576.[3]陶新昕,夏善红,陈绍凤.中国电子学会真空电子学分会第十一届学术年会论文集,北京:1997,335 337.[4]Xia S H,Liu J.J.Vac.Sci.Technol,1998,B-16(3): 1226-1232.
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