Electric Field Micro-sensor with a Closed-loop Autonomous Driving Circuit

Peng Chun-rong, Chen Xian-xiang, Ye Chao, Tao Hu, CuiGuo-ping, Bai Qiang, Chen Shao-feng, and Xia Shan-hong.Design and testing of a micromechanical resonantelectrostatic field sensor. Journal of Micromechanics andMicroengineering, 2006, (16): 914-919.[2]Horenstein M N and Stone P R. A micro-apertureelectrostatic field mill based on MEMS technology. Journal ofElectrostatics, 2001, 5(51-52): 515-521.[3]陶虎, 彭春荣, 陈贤祥, 白强, 陈绍凤, 夏善红. 一种基于微加工技术的微型电场传感器的设计与制造. 电子器件, 2006,29(3): 639-642.Tao Hu, Peng Chun-rong, Chen Xian-xiang, Bai Qiang, ChenShao-feng, and Xia Shan-hong. Design and fabrication of aminiature electric field sensor based on microfabricationtechnology. Chinese Journal of Electron Devices, 2006, 29(3):639-642.[4]彭春荣, 龚超, 陈贤祥, 白强, 陈绍凤, 夏善红. 静电梳齿激励差分检测式微型电场传感器. 中国机械工程, 2005, 16(增刊): 171-172.Peng Chun-rong, Gong Chao, Chen Xian-xiang, Bai Qiang,Chen Shao-feng, and Xia Shan-hong. Electric fieldmicro-sensor based on electrostatic comb-driven anddifferential detecting. China Mechanical Engineering, 2005,16(zl): 171-172.[5]Riehl P S, Scott K L, Muller R S, Howe R T, and Yasaitis JA. Electrostatic charge and field sensors based onmicromechanical resonators[J].Journal of MicroelectromechanicalSystem.2003, 12(5):577-589[6]王巍, 王岩. 振动轮式硅微陀螺仪检测轴的闭环特性. 中国惯性技术学报, 2007, 15(6): 738-742.Wang Wei and Wang Yan. Closed-loop characteristics ofsense axis of vibratory wheel silicon micromechanicalgyroscope. Journal of Chinese Inertial Technology, 2007,15(6): 738-742.[7]孙玉国. 微机械振动式陀螺仪灵敏度分析. 噪声与振动控制,2008, 28(3): 167-168.Sun Yu-guo. Sensitivity solution of a micro machiningresonance gyroscope. Journal of Noise and Vibration Control,2008, 28(3): 167-168.[8]Masayoshi Esashi. Resonant sensors by siliconmicromachining. 1996 IEEE International frequency controlsymposium, Honolulu, HI, USA, 1996: 609-614.[9]Tang W C, Nuyen T C H, and Howe R T. Laterally drivenpolysilicon resonant microstructures. Proc. IEEE MEMS,California, February 1989: 53-59.[10]李艳宁, 赵景等. 温度变化对微梁谐振频率的影响. 天津大学学报, 2008, 41(1): 7-10.Li Yan-ning and Zhao Jing, et al.. Resonant drift ofmicrocantilever caused by temperature variation. Journal ofTianjin University, 2008, 41(1): 7-10.