Liao Bin, Zhang Shao-jun, Zhu Shou-zheng. Modeling and Simulation of 2.45GHz Low-Power Microwave Plasma Source Based on a Microstrip Split-Ring Resonator[J]. Journal of Electronics & Information Technology, 2007, 29(10): 2512-2516. doi: 10.3724/SP.J.1146.2006.00263
Citation:
Liao Bin, Zhang Shao-jun, Zhu Shou-zheng. Modeling and Simulation of 2.45GHz Low-Power Microwave Plasma Source Based on a Microstrip Split-Ring Resonator[J]. Journal of Electronics & Information Technology, 2007, 29(10): 2512-2516. doi: 10.3724/SP.J.1146.2006.00263
Liao Bin, Zhang Shao-jun, Zhu Shou-zheng. Modeling and Simulation of 2.45GHz Low-Power Microwave Plasma Source Based on a Microstrip Split-Ring Resonator[J]. Journal of Electronics & Information Technology, 2007, 29(10): 2512-2516. doi: 10.3724/SP.J.1146.2006.00263
Citation:
Liao Bin, Zhang Shao-jun, Zhu Shou-zheng. Modeling and Simulation of 2.45GHz Low-Power Microwave Plasma Source Based on a Microstrip Split-Ring Resonator[J]. Journal of Electronics & Information Technology, 2007, 29(10): 2512-2516. doi: 10.3724/SP.J.1146.2006.00263
A modeling of 2.45GHz low-power microwave plasma source based on a microstrip split-ring resonator is presented in this paper. According to characteristics of half-wavelength resonator with a open circuit at the end, the parameters such as discharge gap, angular position of the feeding point and permittivity of dielectric substrate are optimized to make the quality factor of microstrip split-ring resonator reach maximum and match the input impedance of the resonator to that of the power supply. The research indicates that experimental results are found to be in good agreement with simulated results. The theoretical basis is gained for further research of low-power microwave microplasma.
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