Non-invasive Wireless and Passive MEMS Intraocular Pressure Sensor

Junbo WANG; Chaochao HE; Deyong CHEN; Jian CHEN; Qiuxu WEI

doi:10.11999/JEIT180045

Volume 40 Issue 11

Oct. 2018

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Article Navigation > Journal of Electronics & Information Technology > 2018 > 40(11): 2787-2794

Junbo WANG, Chaochao HE, Deyong CHEN, Jian CHEN, Qiuxu WEI. Non-invasive Wireless and Passive MEMS Intraocular Pressure Sensor[J]. Journal of Electronics & Information Technology, 2018, 40(11): 2787-2794. doi: 10.11999/JEIT180045

Citation:

Junbo WANG, Chaochao HE, Deyong CHEN, Jian CHEN, Qiuxu WEI. Non-invasive Wireless and Passive MEMS Intraocular Pressure Sensor[J]. Journal of Electronics & Information Technology, 2018, 40(11): 2787-2794. doi: 10.11999/JEIT180045

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Non-invasive Wireless and Passive MEMS Intraocular Pressure Sensor

doi: 10.11999/JEIT180045

1.
State Key Laboratory of Transducer Technology, Institute of Electronics, Chinese Academy of Sciences, Beijing 100190, China
2.
University of Chinese Academy of Sciences, Beijing 100049, China

Funds: The National Natural Science Foundation of China (61372054), The Beijing Municipal Natural Science Foundation (4152056)

Received Date: 2018-01-11
Rev Recd Date: 2018-05-15

Available Online: 2018-05-30

Publish Date: 2018-11-01

Abstract

Abstract

Continuous monitoring of IntraOcular Pressure (IOP) plays an important role in the diagnosis and treatment of the glaucoma. Existing IOP sensors have some problems, such as low sensitivities, high central resonant frequencies and difficult fabrication. In order to solve the aforementioned problems, this paper presents a wireless, passive and non-invasive IOP sensor based on MEMS technology. The sensor contains five stacked layers, where Parylene, copper and PDMS are adopted as the functional materials within two flexible substrate layers, two electrode layers, and a dielectric layer, respectively. The electrode layers and the dielectric layer consist of two inductors and two capacitors to form a resonant circuit in C-L-C-L series. In the term of fabrication, a MEMS planar process followed by thermally shaping is proposed to fit curved surfaces of the eyeballs, and then this design scheme can effectively solve such issues as the difficulty in making the sensor and so on. Experimental results show that the central resonant frequency is decreased to 40 MHz, relative sensitivity is quantified as 1028.57 ppm/kPa, and resolution reached up to 50 Pa (0.375 mmHg). This study can be used for long-term, continuous monitoring of IOP.
- MEMS,
- IntraOcular Pressure (IOP) sensor,
- Wireless and passive,
- Parylene,
- PolyDiMethylSiloxane (PDMS)

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References(25)

References

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