电子束刻蚀超导膜的实验研究
EXPERIMENTAL STUDIES OF ELECTRON BEAM SCULPTURE FOR SUPERCONDUCTING FILMS
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摘要: 本文论述了扫描电子束对YBa2Cu3O7-超导膜进行干法刻蚀的实验研究;试验了电子束工艺参数对刻蚀效果的影响;初步讨论了超导膜改性的机制。扫描电子束能使被刻蚀的超导膜局部改性为非超导膜,将为干法制备超导器件提供一个有效的方法。
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关键词:
- 超导膜; 刻蚀; 材料改性; 扫描电子束
Abstract: A dry sculpture experiment for YBa2Cu3O7- superconducting film using scanning electron beam is presented. The effects of beam technological parameters on sculpture result are tested. The modification mechanism for superconducting films is discussed prelimiarily. -
Stohr J A, et al. Proc. First Int. Congress Vacuum Techniques, Namur, Belgium: 1958, Vol. II Pergamon, Ozford, 1960: 536-544.[2]胡俊宝,等.低温与超导,1991,19(1); 49-53.[3]Shnichi Shibata, et al. Jpn J. Appl. Phys. 1988, 27(4):L646-648.[4]柴璋.氧化物超导体的结构特性和氧的非整比含量.中国化学会第四届无机化学讨论会论文摘要集.北戴河:1992,102. -
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