铅玻璃微通道板芯料的腐蚀和扫描电镜检测
ETCHING OF THE GLASS-CORE OF Pb GLASS MICROCHANNEL PLATE AND ITS QUALITY EXAMINATION
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摘要: 本文用亲电性腐蚀液、静置腐蚀法腐蚀实芯丝铅玻璃微通道板的芯料,并用扫描电镜和X射线能谱仪分析其形貌和化学成份。结果表明,用本腐蚀法可获得内壁光滑、增益高、噪声低的通道板。 文中还提出了一种测量腐蚀速度的新方法。测量结果可靠、重复性好。
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关键词:
Abstract: The stirless method and the electrophilic corrosive reagent is used for etching of the glass-core of Pb glass microchannel plate. The etching quality is examined by means of SEM and EDX, and it shows that there are no residues of the core glass. A reliable and reproducible measuring method of etching velocity is also proposed. -
H. Pollehn et al., Advances in Electronics and Electron physics, 40A(1976), pp. 21-31,[2]J.L.Wiza, Optical Spectra, 4(1981), 58.[3]R.T.莫里森等著,复旦大学化学系有机化学教研组译,有机化学(上册),科学出版社,1980, p. 144. -
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