聚焦电子束离子束用的低球差塞普帖静电透镜的特性
THE PHYSICAL CHARACTERISTICS OF A SMALL SPHERICAL ABERRATION SEPTIER S ELECTROSTATIC LENS FOR ELECTRON OR ION BEAM FOCUSING
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摘要: 塞普帖透镜作为低球差静电透镜,经实践证明是一种比较理想的结构。本文提供的在不同几何尺寸和电极电压下的计算结果,可供不同场合下选择使用的依据。
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Abstract: As a small spherical aberration eleetrostatic lens Septier s lens has been proved to be an almost ideal structure by a number of experiments. This paper provides a meth-od of calculating all the physical characteristics of Septier s electrostatic lens. It also provides the calculated results at various geometrie sizes and voltages; they are useful for making correct choice under different conditions. -
屠幸善、敖超、蔡金荣,光电技术,1980年,2/3期,第138页.[4]LT-1离子探针,中国科学仪器厂鉴定材料,1978.[5]黄蓝友,科学仪器资料汇编I,中国科学仪器厂,1977年,第51页.[6]R. Seeliger, Optik, 4(1948), 258.[7]K. J. Hanszen, Z. Naturf., 13a(1958), 409. -
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