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掺氮对类金刚石薄膜场发射的影响

马会中,  张兰,  姚宁,  李运均,  毕兆琪,  王小平,  张兵临,  胡欢陵

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文章导航 > 电子与信息学报  > 2001 >  23(11): 1246-1248
马会中, 张兰, 姚宁, 李运均, 毕兆琪, 王小平, 张兵临, 胡欢陵. 掺氮对类金刚石薄膜场发射的影响[J]. 电子与信息学报, 2001, 23(11): 1246-1248.
引用本文: 马会中, 张兰, 姚宁, 李运均, 毕兆琪, 王小平, 张兵临, 胡欢陵. 掺氮对类金刚石薄膜场发射的影响[J]. 电子与信息学报, 2001, 23(11): 1246-1248.
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Ma Huizhong, Zhang Lan, Yao Ning, Bi Zhaoqi, Wang Xiaoping, Li Yunjun, Zhang Binglin, Hu Huanling. THE EFFECT OF NITROGEN ADDITION ON FIELD EMISSION OF DIAMOND-LIKE CARBON FILMS[J]. Journal of Electronics & Information Technology, 2001, 23(11): 1246-1248.
Citation: Ma Huizhong, Zhang Lan, Yao Ning, Bi Zhaoqi, Wang Xiaoping, Li Yunjun, Zhang Binglin, Hu Huanling. THE EFFECT OF NITROGEN ADDITION ON FIELD EMISSION OF DIAMOND-LIKE CARBON FILMS[J]. Journal of Electronics & Information Technology, 2001, 23(11): 1246-1248.
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掺氮对类金刚石薄膜场发射的影响

THE EFFECT OF NITROGEN ADDITION ON FIELD EMISSION OF DIAMOND-LIKE CARBON FILMS

    摘要
  • 摘要: 利用脉冲激光沉积技术制备出了掺氮和未掺氮的类金刚石薄膜。采用X射线衍射仪、喇曼光谱仪、扫描电镜观察了掺氮和未掺氮类金刚石薄膜的微结构和表面形貌。场发射实验表明,掺氮降低了类金刚石薄膜的阈值电场,提高了发射电流密度。
    Abstract: The Diamond-Like Carbon (DLC) film and Nitrogen-doped DLC(N-DLC) film are deposited on molybdenum coated ceramic substrate by using the pulsed laser deposition technique. The microstructure and morphology of the films are examined using X-ray diffraction, Raman spectroscopy and scanning electron microscopy. Field emission measurements are carried out by using the diode structure. The field emission measurements indicate that nitrogen doping can lower the turn-on field and increase the current density.
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    • 参考文献(1)
  • Z. Feng, I. G. Brown, J. W. Auger, Electron emission from chemical vapor deposited diamondand amorphous carbon films observed with a simple field emission device, J. Mater. Res, 1995,10(7), 1585-1588.[2]F.Y. Chuang, C. Y. Sun, et al., Local electron field emission characteristics of pulsed laserdeposited diamondlike carbon films, Appl. Phys. Left., 1996, 69(23), 3504-3506.[3]Young Kyu Hong.[J].Ju-Jin Kim, et al., Field electron emission of diamond-like-carbon films de-posited by a laser ablation method, Techanical Digest of IVCM97, Korea.1997,:-[4]G.A.J. Amaratunga, S. R. P. Silva, Nitrogen containing hydrogenated amorphous carbon forthin-film field emission cathodes, Appl. Phys. Lett., 68(18), 1996, 2529-2531.[5]J. Chen, A. X. Wei, et al., Study of field electron emission phenomena associated with n-dopedamorphous diamond films, Journal of Vacuum Science and Technology, B16(2), 1998, 697-699.
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出版历程
  • 收稿日期:  1999-07-26
  • 修回日期:  1999-08-13
  • 刊出日期:  2001-11-19

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