p-InP/Ag-Zn/Mn系的接触特性及其应用
CONTACT CHARACTERISTICS OF THE p-InP/Ag-Zn/Mn SYSTEM AND APPLICATION
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摘要: 本文研究了p-InP/Ag-Zn/Mn系的接触特性和界面互扩散问题。结果表明:该系的比接触电阻与Au-Zn系相当。而Ag的内扩散程度较Au低,有利于器件可靠性的改善。该系用作InGaAsP/InP边发光管的p面电极,器件的Rs4--6。
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关键词:
- 比接触电阻; 合金化; 互扩散
Abstract: The contact characteristics and the interdiffusion of p-InP/Ag-Zn/Mn system are investigated by four-probe method and Auger electroscopy. The surface morphology of the heat treatment sample is observed by SEM. The specific contact resistance (ec) which is function of the alloy temperature and time is also given. The (ec(2-4)10-4cm at 400. The Ag-Zn/Mn system already is used in the InGaAsP/InP Edgeemitting LEDS, Rs4-6. The results shown that the Ag-Mn material is stable and reproducible. -
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