一种新的非均匀减薄法选择阳极氧化法
A NEW TECHNIQUE FOR THINNING THE THICKNESS OF UNUNIFORM EPILAYERS--SELECTIVE ANODIC OXIDATION
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摘要: 提出了一种新的非均匀减薄法,即选择阳极氧化法。用于n+-n-n++GaAs高低结雪崩二极管的n+层厚度的控制,使器件的效率达到理论值。
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关键词:
- 半导体工艺; 减薄技术; 选择阳极氧化
Abstract: A new technique called selective anodic oxidation, by which the ununiform epilayers can be thinned, is presented. The thickness of n+-layers of GaAs IMPATT diodes with n+-n-n++ structure has been strictly controlled by the use of this technique. This results in the efficiency of IMPATT diodes up to its theoretical value. -
Ho-Chung Huang, IEEE Trans. on ED, ED-20(1973), 482. -
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