采用悬挂金属掩模制作约瑟夫逊隧道结
FABRICATION OF JOSEPHSON TUNNEL JUNCTION WITH SUSPENDED METAL MASK
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摘要: 正 1.引言 近几年来由于约瑟夫逊隧道结在许多方面得到应用,特别是在新一代超级电子计算机上得到了应用,所以人们对制作小面积隧道结的技术产生了浓厚的兴趣。制作软金属超导隧道结,以IBM为代表已形成一套完整的工艺。但要用他们的办法重复地制作出实用的隧道结,必须有高级的专用设备和丰富的技术积累。一般单位在短期内是难以达到这样的技术水平的。1982年Gundlach(西德马克斯-普朗克学会)发表的文章仍在使用刀片制作的金属掩模。我们也曾经使用过这种掩模,但是用一般形式的金属掩模制作隧道结时,在氧化层势垒形成以后,必须打开镀膜机的钟罩,以便转换掩模制作上电极。这样氧化层势垒就容易受到大气污染。 为了克服这一缺点,我们用刀片拼装成的悬挂金属掩模来制作隧道结。这一技术具
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Abstract: A small area Josephson tunnel junction is fabricated with suspended metai mask which is made from ordinary razor blades. The junction overlap is formed by two succeeding evaporations of susperconductor materials at oblique angles. The advantages of this technique are that the fabrieation processes ean be performed continuously without opening the evaperation chamber and also it is suitable for making a small area tunnel junction. The I-V charaeteristic of a tunnel junction made by this technique has been taken at 4.2K. -
J. H. Greiner et al., IBM J. Res. Develop., 24(1980), 195.[2]K. H. Gundlach et al., Appl. Phys. Lett., 41(1982), 294.[3]杨彩炳等,Pb-In合金sIs结的初步研究,第三次超导隧道效应全国学术会议,1982.[4]G. M. Daalmans, Proc. of Second international Conference on Superconducting Quantum Interference Devices and their Applications, Berlin(West); May 6-9, 1980, p. 399, ed. by H.D. Hahlbohm and H. Lbbig.[5]J. T. C. Yeh, J.Appl. Phys. 45(1974 ), 4617.[6]G. J. Dolan, Appl. Phys. Lett., 31(1977 ), 337. -
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